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Showing all articles related to Cu Damascene

Copper Electroplating Fundamentals

November 22, 2016

A short tutorial examining the fundamentals of copper plating

This tutorial examines the concept of copper electroplating and how the process works. It also discusses its use in advanced packaging applications like the dual damascene process, TSV, copper pillars, and copper RDL, as well as how feature geometry as well as plating time affect how additives behave.

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